1.
Conference Proceedings
Lee, T.-K. ; Wang, Y.-C. ; Chi, M. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA . pp.346-352, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
2.
Conference Proceedings
Lee, T.-K. ; Wang, Y.-C. ; Chi, M.-H. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.:
Optical Microlithography XVI . Part One pp.450-456, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
3.
Conference Proceedings
Lee, T.-K. ; Wang, Y.-C. ; Chi, M.-H. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.:
Optical Microlithography XVI . Part One pp.450-456, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040