1.

Conference Proceedings
Conference Proceedings
1. Characterization of polymer formation during Si02 etching with different fluorocarbon gases (CHF3,CF4,C4F8)
Loong,S.Y. ; Lee,H.K. ; Chan,L.H. ; Zhou,M.S. ; Loh,F.C. ; Tan,K.L.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.376-382,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
2.

Conference Proceedings
Conference Proceedings
2. Characterization of pattern density and the metal stack composition on chlorine residues from the metal etch process
Loong,S.Y. ; Lee,H.K. ; Zhou,M.S. ; Chan,L.H. ; Premachandran,V.
Pub. info.: Multilevel Interconnect Technology II.  pp.170-180,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3508