Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.368-375, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore. pp.270-278, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering