1.

Conference Proceedings
Conference Proceedings
1. Comparative Growth Kinetics of SiGe in a Commercial Reduced Pressure Chemical Vapor Deposition EPI Reactor and Anomalies During Growth of Thin Si Layers on SiGe
Caymax, Matty ; Loo, Roger ; Brijs, Bert ; Vandervorst, Wilfried ; Howard, David J. ; Kimura, Kenji ; Nakajima, Kaoru
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.339-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
2.

Conference Proceedings
Conference Proceedings
2. Ge Island Evolution During Growth, In Situ Anneal, and Si Capping in an Industrial CVD Reactor
Loo, Roger ; Meunier-Beillard, Philippe ; Dentel, Didier ; Goryll, Michael ; Vanhaeren, Danielle ; Vescan, Lili ; Bender, Hugo ; Caymax, Matty ; Vandervorst, Wilfried
Pub. info.: Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 664