1.

Conference Proceedings
Conference Proceedings
1. Characterization Of ECR Oxide Films For ILD Applications
Fowler, B.W. ; Carpio, R.A.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.492-502,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
2.

Conference Proceedings
Conference Proceedings
2. The Measurement of Submicron Epitaxial Layer Thickness and Free Carrier Concentration by Infrared Reflectance Spectroscopy
Fowler, B.W. ; Simmons, D.G. ; Carpio, R.A. ; Liu, S. ; Solomon, P.R. ; Nishikida, K.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.254-265,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
3.

Conference Proceedings
Conference Proceedings
3. THE REACTION OF VAPOR HF WITH CHEMICALLY FORMED SILICON OXIDE: PRODUCTION OF STABLE HYDROGEN- TERMINATED SURFACES
Barnett, J.M. ; Grothe, P.A. ; Martin, J.S. ; Carpio, R.A. ; Fowler, B.W. ; Atluri, Vasu ; Herbots, Nicole
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.126-133,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20