Goorsky, M.S. ; Kuech, T.F. ; Mooney, P.M. ; Cardone, F. ; Potemski, R.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.177-182, 1991. Pittsburgh, Pa.. Materials Research Society