Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560E-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Poppe, W. J. ; Capodieci, L. ; Wu, J. ; Neureuther, A.
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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560P-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Jessop, J. L. P. ; Goldie, S. N. ; Scranton, A. B. ; Blanchard, G. J. ; Rangarajan, B. ; Capodieci, L. ; Subramanian, R. ; Templeton, M. K.
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Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.914-922, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.189-197, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Lorusso, G. F. ; Capodieci, L. ; Stoler, D. ; Schulz, B. ; Roling, S. ; Schramm, J. ; Tabery, C. ; Shah, K. ; Singh, B. ; Abbott, G. ; Azordegan, A. ; Heinrichs, L. ; Kaliblotzky, Z. ; Castel, E.
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Metrology, Inspection, and Process Control for Microlithography XX. pp.61520B-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Metrology, Inspection, and Process Control for Microlithography XX. pp.615201-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering