von Bardeleben, H.J. ; Cantin, J.L. ; Mynbaeva, M. ; Saddow, S.E. ; Shishkin, Y. ; Devaty, R.P. ; Choyke, W.J.
Pub. info.:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.39-54, 2003. Pennington, N.J.. Electrochemical Society
von Bardeleben, H.J. ; Cantin, J.L. ; Shishkin, Y. ; Devaty, R.P. ; Choyke, W.J.
Pub. info.:
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1457-1462, 2004. Uetikon-Zuerich. Trans Tech Publications