Sabate, N. ; Keller, J. ; Gollhardt, A. ; Vogel, D. ; Gracia, I. ; Cane, C. ; Morante, J. R. ; Michel, B.
Pub. info.:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain. pp.416-424, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Sabate, N. ; Gracia, I. ; Cane, C. ; Berganzo, J. ; Puicorbe, J. ; Morante, J.R.
Pub. info.:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.549-555, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering