Hartwig, S. ; Hildenbrand, J. ; Moreno, M. ; Fonollosa, J. ; Fonseca, L. ; Santander, J. ; Rubio, R. ; Cane, C. ; Lambrecht, A. ; Wollenstein, J.
Pub. info.:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain. pp.452-460, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering