Sabate, N. ; Gracia, I. ; Cane, C. ; Berganzo, J. ; Puicorbe, J. ; Morante, J.R.
Pub. info.:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.549-555, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering