1.

Conference Proceedings
Conference Proceedings
1. Evidence of Interdiffusion Effect in Stacked Polycrystalline SiGe/Si Layers for CMOS Gate Application
Hernandez, C. ; Campidelli, Y. ; Sagnes, I. ; Henrisey, E. ; Martin, F. ; Bensahel, D.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.93-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
2.

Conference Proceedings
Conference Proceedings
2. Si1-xGex oxidation by plasma assisted processing: oxide uniformity and electrical properties
Busani, T. ; Plantier, H. ; Devine, R.A.B. ; Hernandez, C. ; Campidelli, Y.
Pub. info.: Compound semiconductor surface passivation and novel device processing : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.157-162,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 573