1.

Conference Proceedings

Conference Proceedings
Dai, X. ; Zhao, X. ; Li, W. ; Cai, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.97-103,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
2.

Conference Proceedings

Conference Proceedings
Dai, X. ; Zhao, X. ; Ding, G. ; Cai, B.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.1-6,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641