Search records | 東京工業大学附属図書館文献データベース

Sort order

3 results

Conference Proceedings

1. Hardware, materials, and parameters optimization for improvement of immersion overlay

W. Ma ; Y. Hwang ; E. Kang ; S. Park ; J. Kang ; C. Lim ; S. Moon

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

2. Characteristics and prevention of pattern collapse in EUV lithography

W. Chang ; E. Kim ; Y. Kang ; S. Park ; C. Lim ; K. Won ; J. Kim ; H. Oh

Pub. info.:	Emerging lithographic technologies XI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6517

Conference Proceedings

3. Hyper NA polarized imaging of 45nm DRAM

C. Lim ; S. Park ; Y. Hyun ; J. Kim ; T. Eom ; J. Park ; S. Moon

Pub. info.:	Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6520