1.

Technical Paper

Technical Paper
C. Fong ; C. Huang ; V. Chu ; A. Hsiao ; E. Yang ; N. Yen ; S. Chen ; D. Hawes ; Y. Kuo ; Y. Liou ; S. Chi
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Space Conference and Exposition
Ser. no.: 2007
2.

Conference Proceedings

Conference Proceedings
C. Huang ; C. Yang ; E. Yang ; T. Yang ; K. Chen ; J. Ku ; C. Lu
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518