1.

Conference Proceedings
Conference Proceedings
1. The Process and Optoelectronic Characterization of Ge-on-Insulator
C. Liu ; C. Yu ; M. Liao ; C. Huang ; C. Lee
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.117-127,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
2.

Conference Proceedings
Conference Proceedings
2. 45nm design rule in-die overlay metrology on immersion lithography processes
Y. Shih ; G. K. Huang ; C. Yu ; M. Adel ; C. K. Huang ; P. Izikson ; E. Kassel ; S. Mathur ; C. Huang ; D. Tien ; Y. Avrahamov
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518