1.

Conference Proceedings
Conference Proceedings
1. The novel advanced process control to eliminate AlCu-PVD induced overlay shift
C. Huang ; C. Yang ; E. Yang ; T. Yang ; K. Chen ; J. Ku ; C. Lu
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Ytterbium-doped high power fiber lasers with fused fiber bundle combiner
J. Zhang ; C. Huang ; C. Yang ; Y. Li ; W. Chen
Pub. info.: Photonics and Optoelectronics Meetings (POEM) 2008 : laser technology and applications : 24-27 November 2008 Wuhan, China.  pp.72760U-1-72760U-8,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7276