1.

Technical Paper

Technical Paper
Y. Sun ; Z. Wang ; Y. Liu ; C. Chen
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2007
2.

Conference Proceedings

Conference Proceedings
Y. Liu ; W. Liao ; H. Lin ; C. Chen ; C. C. Huang
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518