1.

Conference Proceedings
Conference Proceedings
1. Aluminum Nitride Thin Film for Stress Biosensing Application
K. Ou ; C. Liu ; C. Chen ; C. Lin ; S. Lee
Pub. info.: Biosensor Systems.  pp.27-37,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(19)
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of litho printability of DRAM contact hole patterns with various programmed defects
K. Seo ; S. Lee ; H. Kim ; D. Hwang ; S. Kim ; G. Jeong ; O. Han ; C. Chen ; D. Yee ; E. Kim ; K. Park ; N. Kim ; S. Choi ; D. Kim ; S. Lohokare
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
3.

Conference Proceedings
Conference Proceedings
3. Development of thick negative photoresists for electroplating applications
C. Chen ; R. Plass ; E. Ng ; S. Lee ; S. Meyer
Pub. info.: Advances in resist materials and processing technology XXV.  2  pp.69233E-1-69233E-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923