V. S. Chang ; Y. Hou ; P. Hau ; P. Lim ; L. Yao ; F. Yen ; C. Hung ; H. Lin ; J. Jiang ; Y. Jin ; C. Chen ; H. Tao ; S. Chen ; S. Jang ; M. Liang
Pub. info.:
Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA. pp.113-124, 2006. Pennington, N.J.. Electrochemical Society
B. Lin ; V. Giurgiutiu ; Z. Yuan ; J. Liu ; C. Chen ; J. Jiang ; A. S. Bhalla ; R. Guo
Pub. info.:
Sensors and smart structures, technologies for civil, mechanical, and aerospace systems. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering