1.

Conference Proceedings
Conference Proceedings
1. Development of nanocomposite resists with high plasma etch resistance
C. Chen ; H. Zhuang ; P. Lu ; M. Neisser ; G. Pawlowski
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
2.

Conference Proceedings
Conference Proceedings
2. PAG distribution and acid thermal diffusion study in ultra-thick chemically amplified resist films
M. Toukhy ; M. Paunescu ; C. Chen ; G. Pawlowski
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
3.

Conference Proceedings
Conference Proceedings
3. Performance comparison of negative resists for copper rerouting and other electroplating applications
M. Toukhy ; C. Chen ; M. Paunescu ; G. Pawlowski
Pub. info.: Advances in resist materials and processing technology XXV.  2  pp.69233I-1-69233I-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923