1.

Conference Proceedings
Conference Proceedings
1. Immersion defect reduction, part I: analysis of water leaks in an immersion scanner
F. Liang ; H. Chang ; L. Shiu ; C. Chen ; L. Chen ; T. Gau ; B. J. Lin
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Immersion defect reduction, part II: the formation mechanism and reduction of patterned defects
L. Shiu ; F. Liang ; H. Chang ; C. Chen ; L. Chen ; T. Gau ; B. J. Lin
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520