Becker, H. ; Renno, M. ; Hermanns, U. ; Seitz, H. ; Buttgereit, U. ; Knapp, K. ; Hess, G.
Pub. info.:
Advances in optical thin films II : 13-15 September 2005, Jena, Germany. pp.59630J-, 2005. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Seitz, H. ; Sobel, F. ; Renno, M. ; Leutbecher, T. ; Olschewski, N. ; Reichardt, T. ; Walter, R. ; Becker, H. ; Buttgereit, U. ; HeB, G. ; Knapp, K. ; Wies, C. ; Lebert, R.
Pub. info.:
EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany. pp.244-251, 2005. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Yoshizawa, M. ; Philipsen, V. ; Leunissen, A. H. L. ; Hendrickx, E. ; Jonckheere, R. ; Vandenberghe, G. ; Buttgereit, U. ; Becker, H. ; Koepernik, C. ; Irmscher, M.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XIII. pp.62831G-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Koepernik, C. ; Becker, H. ; Brikner, R. ; Buttgereit, U. ; Irmscher, M. ; Nedelmann, L. ; Zibold, A.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XIII. pp.62831D-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Becker, H.W. ; Sobel, F. ; Aschke, L. ; Renno, M. ; Krieger, J. ; Buttgereit, U. ; HeB, G. ; Lenzen, F. ; Knapp, K. ; Yulin, S.A. ; Feigl, T. ; Kuhlmann, T. ; Kaiser, N.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part One pp.389-399, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Cummings, K.D. ; Schneider-Stoermann, L.U. ; Buttgereit, U. ; Irmscher, M. ; Mueller, D. ; Hudek, P. ; Beyer, D. ; Brendel, B. ; Whittey, J.M. ; Eynon, B.G. ; Harsch, J. ; Constantine, C. ; Miller, K.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part One pp.15-24, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Sobel, F. ; Aschke, L. ; Renno, M. ; Seitz, H. ; Becker, H. W. ; Olschewski, N. ; Reichardt, T. ; Hess, G. ; Buttgereit, U. ; Knapp, K. ; Letzkus, F. ; Butschke, J. ; Koepernik, C.
Pub. info.:
24th Annual BACUS Symposium on Photomask Technology. pp.781-790, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Sobel, F. ; Aschke, L. ; Becker, H.W. ; Renno, M. ; Ruggeberg, F. ; Kirchner, S. ; Leutbecher, T. ; Olschewski, N. ; Schiffler, M. ; Walter, K. ; Hess, G. ; Buttgereit, U. ; Knapp, K. ; Lebert, R. ; Juschkin, L. ; Wies, C. ; Jagle, B.
Pub. info.:
23rd Annual BACUS Symposium on Photomask Technology. pp.1259-1270, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Becker, H.W. ; Schmidt, F. ; Sobel, F. ; Renno, M. ; Buttgereit, U. ; Chey, J. ; Angelopoulos, M. ; Knapp, K. ; Hess, G.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI. pp.542-549, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Koepernik, C. ; Becker, H. W. ; Butschke, J. ; Buttgereit, U. ; Irmscher, M. ; Nedelmann, L. ; Schmidt, F. ; Teuber, S.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XII. pp.463-473, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering