1.

Conference Proceedings
Conference Proceedings
1. The importance of being homogeneous: on the influence of illumination inhomogeneity on AIMS images [5992-99]
Durr, A. C. ; Bubke, K. ; Sczyrba, M. ; Angonin, S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922Y-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings
Conference Proceedings
2. Aerial image based mask defect detection in dense array structures [5853-85]
Kohle, R. ; Hennig, M. ; Pforr, R. ; Bubke, K. ; Sczyrba, M. ; Durr, A. C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.953-964,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853