Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.102-109, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.2-13, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.233-243, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.223-232, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chemical microsensors and applications II : 19-20 September 1999, Boston, Massachusetts. pp.158-169, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.2-10, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.308-317, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II. pp.98-106, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering