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Conference Proceedings

1. Determination of mechanical material properties of piezoelectric ZnO films

Koller,S. ; Ziebart,V. ; Paul,O. ; Brand,O. ; Baltes,H. ; Sarro,P.M. ; Vellekoop,M.J.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.102-109, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

2. CMOS MEMS technology and CAD:the case of thermal microtransducers

Baltes,H. ; Brand,O. ; Paul,O.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.2-13, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

3. Long-term stability of membrane transducers for proximity sensing

Hornung,M. ; Brand,O. ; Paul,O. ; Baltes,H.

Pub. info.:	Micromachined Devices and Components IV. pp.251-259, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514