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Conference Proceedings

1. CMOS chemical microsensors based on resonant cantilever beams

Lange.D ; Koll,A. ; Brand,O. ; Baltes,H.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.233-243, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

2. Flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds

Koll,A. ; Kawahito,S. ; Mayer,F. ; Hagleitner,C. ; Scheiwller,D. ; Brand,O. ; Baltes,H.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.223-232, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

3. CMOS-based chemical microsensors:components of a micro nose system

Hierlemann,A. ; Koll,A. ; Lange,D. ; Hagleitner,C. ; Kerness,N. ; Brand,O. ; Baltes,H.

Pub. info.:	Chemical microsensors and applications II : 19-20 September 1999, Boston, Massachusetts. pp.158-169, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3857

Conference Proceedings

4. Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating

Koll,A. ; Kummer,A. ; Brand,O. ; Baltes,H.

Pub. info.:	Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.308-317, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3673