1.

Conference Proceedings
Conference Proceedings
1. Batch-Fabricated Microjet Coolers for Electronic Components
Lagorce,L.K. ; Kercher,D. ; English,J. ; Brand,O. ; Glezer,A. ; Allen,M.G.
Pub. info.: Proceedings : 1997 International Symposium on Microelectronics : 14-16 October 1997, Pennsylvania Convention Center Philadelphia, Pennsylvania.  pp.494-499,  1997.  Reston, VA.  IMAPS
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3235
2.

Conference Proceedings
Conference Proceedings
2. Micromachined sensor for in-situ monitoring of wafer state in plasma etching
Baker,M.D. ; Brand,O. ; Allen,M.G. ; May,G.S.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.98-106,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876