Herbots, N. ; Atluri, V. ; Hurst, Q. B. ; Shaw, J. M. ; Banerjee, S. ; Bradley, J. D. ; Culbertson, R. J. ; Smith, D. J.
Pub. info.:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.137-, 1998. Warrendale, Pa. MRS - Materials Research Society
Hurst, Q. B. ; Herbots, N. ; Shaw, J. M. ; Floyd, M. M. ; Smith, D. J. ; Culbertson, R. J. ; Grams, M. P. ; Bradley, J. D. ; Zimmerman, P. ; Atluri, V.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.181-, 1999. Warrendale, PA. MRS - Materials Research Society