1.

Conference Proceedings
Conference Proceedings
1. NEW ALGORITHMS FOR RAPID FULL-WAFER MAPPING BY HIGH RESOLUTION DOUBLE AXIS X-RAY DIFFRACTION
Loxley, N. ; Cockerton, S. ; Cooke, L. M. ; Gray, T. ; Tanner, B. K. ; Bowen, D. K.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.451-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
2.

Conference Proceedings
Conference Proceedings
2. Combined Room Temperature Photoluminescence and High Resolution X-ray Diffraction Mapping of Semiconductor Wafers
Cockerton, S. ; Cooke, M. L. ; Bowen, D. K. ; Tanner, B. K.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.555-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406