1.

Conference Proceedings
Conference Proceedings
1. Environment-induced failure modes of thin film resonators
Kazinczi,R. ; Mollinger,J.R. ; Bossche,A.
Pub. info.: Smart materials.  pp.258-268,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4234
2.

Conference Proceedings
Conference Proceedings
2. Reliability of silicon nitride as structural material in MEMS
Kazinczi,R. ; Mollinger,J.R. ; Bossche,A.
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.174-183,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875