1.

Conference Proceedings
Conference Proceedings
1. Gate oxide Integrity Response as a Function of Near the Surface Crystal Defects Morphology
Borionetti, G. ; Godio, P. ; Bonoli, F. ; Comara, M. ; Orizio, R. ; Falster, R.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.456-466,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
2.

Conference Proceedings
Conference Proceedings
2. Study on the Effect of Silicon Surface Cleaning Processes on Gate Oxide Integrity
Corradi, A. ; Borzoni, E. ; Godio, P. ; Borionetti, G.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.241-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
3.

Conference Proceedings
Conference Proceedings
3. Investigation on Low Density Defects in Czochralski Silicon Crystals: Their Detectability, Formation Kinetics and Influence on Gate Oxide Integrity
Borionetti, G. ; Godio, P. ; Porrini, M. ; Ilic, S.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.160-169,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13