Borionetti, G. ; Porrini, M. ; Geranzani, P. ; Orizio, R. ; Falster, R.
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Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.104-110, 1994. Pennington, NJ. Electrochemical Society
Borionetti, G. ; Falster, R. ; Bertolini, S. ; Cornara, M. ; Olmo, M. ; Chalmers, G. ; Childs, R. ; Marcuccilli, G.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.196-203, 1997. Pennington, NJ. Electrochemical Society