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Conference Proceedings

1. Calibration strategies for overlay and registration metrology

Silver, R.M. ; Stocker, M.T. ; Attota, R. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.103-120, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5038

Conference Proceedings

2. High-resolution optical overlay metrology

Silver, R.M. ; Attota, R. ; Stocker, M. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVIII. pp.78-95, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5375

Conference Proceedings

3. Evaluation of new in-chip and arrayed line overlay target designs

Attota, R. ; Silver, R.M. ; Bishop, M. ; Marx, E. ; Jun, J.-S.J. ; Stocker, M. ; Davidson, M.P. ; Larrabee, R.D.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVIII. pp.395-402, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5375

Conference Proceedings

4. Overlay tool comparison for sub-130-nm technologies

Russo, B. ; Bishop, M. ; Benoit, D.C. ; Silver, R.M.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVI. Part One pp.261-272, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4689