1.

Conference Proceedings
Conference Proceedings
1. EFFECTIVE INTRINSIC GETITERING FOR 200 mm AND 300 mm P/P- WAFERS IN LOW THERMAL BUDGET 0.13 pm ADVANCED CMOS LOGIC PROCESS
Binns, M.J. ; Bertolini, S. ; Wise, R. ; Myers, D.J. ; McKenna, T.A.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.647-657,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. EFFECTIVE INTRINSIC GETITERING FOR 200 mm AND 300 mm P/P- WAFERS IN LOW THERMAL BUDGET 0.13 μm ADVANCED CMOS LOGIC PROCESS
Binns, M.J. ; Bertolini, S. ; Wise, R. ; Myers, D.J. ; McKenna, T.A.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.647-657,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2