Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.159-166, 1990. Pittsburgh, Pa.. Materials Research Society
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.273-280, 1990. Pittsburgh, Pa.. Materials Research Society