1.

Conference Proceedings
Conference Proceedings
1. Stress in Silicon Due to the Formation of Self Aligned Poly-CoSi2 Lines Studied by Micro-Raman Spectroscopy
Howard, D. J. ; Wolf, I. De ; Bender, H. ; Maex, K.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.251-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
2.

Conference Proceedings
Conference Proceedings
2. Influence of the As and BF2 Junction Implantation on Stress Induced Defects During Ti- and Co/Ti-Silicidation
Steegen, A. ; Bender, H. ; Wolf, I. De ; Maex, K.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.15-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564