1.

Conference Proceedings
Conference Proceedings
1. Effect of Aging on Stress in Silicon Nitride Films by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition Technique.
Sah, R.E. ; Baumann, H. ; Serries, D. ; Kiefer, R. ; Braunstein, J.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.26-37,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6
2.

Conference Proceedings
Conference Proceedings
2. Low-Temperature Plasma Deposition of Passivating Layers with Low Hydrogen Content for Optoelectronic Devices
Sah, R.E. ; Baumann, H.
Pub. info.: Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors.  pp.214-220,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-2
3.

Conference Proceedings
Conference Proceedings
3. Investigation of the Fluorine Microalloying Effect in the Oxidation of TiAl at 900℃ in Air
Zschau, H.-E. ; Schuetze, M. ; Baumann, H. ; Bethge, K.
Pub. info.: High temperature corrosion and materials chemistry : proceedings of the International Symposium.  pp.71-83,  2003.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-16
4.

Conference Proceedings
Conference Proceedings
4. ECR-Plasma Deposited Oxygen-Free SiNx Films for Low and High Reflectivity Coatings for GaAs Based Devices
Sah, R.E. ; Weimar, W. ; Baumann, H. ; Wagner, J. ; Kiefer, R. ; Muller, S.
Pub. info.: Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI).  pp.178-185,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-1
5.

Conference Proceedings
Conference Proceedings
5. Comparison of the Release at a Hydrophobic and a Hydrophilic Direct Bonding Interface
Mack, S. ; Baumann, H. ; Werner, H. ; Schloegl, R.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.299-306,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
6.

Conference Proceedings
Conference Proceedings
6. Thermally Induced Stress Changes in High Density Plasma Deposited Silicon Nitride Films
Shah, R.E. ; Baumann, H. ; Serries, D. ; Mikulla, M. ; Keiffer, R.
Pub. info.: Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium.  pp.253-263,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-7
7.

Conference Proceedings
Conference Proceedings
7. Vacancy-Type Defects in Electron and Proton Irradiated II-VI Compounds
Brunner, S. ; Puff, W. ; Mascher, P. ; Balogh, A. G. ; Baumann, H.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.235-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
8.

Conference Proceedings
Conference Proceedings
8. The Influence of Nitrogen Implantation on the Hydrogen Distribution in Titanium Observed by NRA and XPS
Soltani-Farshi, M. ; Baumann, H. ; Baretzky, B. ; Ruck, D. ; Bethge, K.
Pub. info.: Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.203-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 513
9.

Conference Proceedings
Conference Proceedings
9. Vacancy-Type Defects in Electron and Proton Irradiated II-VI Compounds
Brunner, S. ; Puff, W. ; Mascher, P. ; Balogh, A. G. ; Baumann, H.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.185-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
10.

Conference Proceedings
Conference Proceedings
10. Positron Studies of Defects in Nitrogen and Carbon Implanted Titanium
Soltani-Farshi, M. ; Baumann, H. ; Anwand, W. ; Brauer, G. ; Coleman, P. G. ; Richter, E. ; Kreissig, U. ; Bethge, K.
Pub. info.: Diffusion mechanisms in crystalline materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.81-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 527
11.

Conference Proceedings
Conference Proceedings
11. A Depth Selective Mossbauer Study of Ion Implanted Stainless Steel
Walter, G. ; Stahl, B. ; Nagel, R. ; Gellert, R. ; Ruck, D. M. ; Muller, M. ; Klingelhofer, G. ; Kankeleit, E. ; Soltani-Farshi, M. ; Baumann, H.
Pub. info.: Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A..  pp.277-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 504
12.

Conference Proceedings
Conference Proceedings
12. Thermal Behavior of Implanted Nitrogen and Accumulated Hydrogen in Titanium
Soltani-Farshi, M. ; Baumann, H. ; Ruck, D. ; Walter, G. ; Bethge, K.
Pub. info.: Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A..  pp.231-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 504
13.

Conference Proceedings
Conference Proceedings
13. Self-assembled silicon nanostructure growth by electron beam annealing
Johnson, S. ; Markwitz, A. ; Rudolphi, M. ; Baumann, H. ; Kuo, P.-Y. ; Blaikie, R.
Pub. info.: Smart materials III : 13-15 December 2004, Sydney, Australia.  pp.294-300,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5648
14.

Conference Proceedings
Conference Proceedings
14. Bonding of Structured Wafers
Baumann, H. ; Mack, S. ; Muenzel, H.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.471-487,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
15.

Conference Proceedings
Conference Proceedings
15. Composition and Mechanical Properties of Sill-con Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma-Enhanced Chemi-cal Vapor Deposition Technique
Sah, R.E. ; Baumann, H. ; Ohle, T.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.552-564,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10
16.

Conference Proceedings
Conference Proceedings
16. The Quantitative Role of Surface Doped Fluorine for the Improvement of Oxidation Resistance of TiAl in Air
Zschau, H.E. ; Schutze, M. ; Baumann, H. ; Bethge, K.
Pub. info.: High temperature corrosion and protection of materials 6 : proceedings of the 6th International Symposium on High Temperature Corrosion and Protection of Materials = High temperature corrosion and protection of materials 6 : actes du 6ème Colloque International sur la Corrosion et la Protection des Matériaux à Haute Température : Les Embiez, France, May 16-21, 2004.  pp.505-512,  2004.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 461-464
17.

Technical Paper
Technical Paper
17. A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application
Thomae, A. ; Schellin, R. ; Lang, M. ; Bauer, W. ; Mohaupt, J. ; Bischopink, G. ; Tanten, L. ; Baumann, H. ; Emmerich, H. ; Pinter, S. ; Marek, J. ; Funk, K. ; Lorenz, G. ; Neul, R.
Pub. info.: 1999 SAE International Congress and Exposition: technical paper.  pp.1-6,  1999.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 1999