1.

Conference Proceedings
Conference Proceedings
1. The Carbon Co-Implant With Spike RTA Solution for Boron Extension
Bartek J. Pawlak ; Emmanuel Augendre ; Simone Severi ; Pierre Eyben ; Tom Janssens ; Annelies Falepin ; Philippe Absil ; Wilfried Vandervorst ; Susan Felch ; Erik Collart ; Robert Schreutelkamp ; Nick Cowern
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.21-26,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
2.

Conference Proceedings
Conference Proceedings
2. The Carbon Co-Implant With Spike RTA Solution for Phosphorus Extension
Bartek J. Pawlak ; Ray Duffy ; Emmanuel Augendre ; Simone Severi ; Tom Janssens ; Philippe Absil ; Wilfried Vandervorst ; Erik Collart ; Susan Felch ; Robert Schreutelkamp ; Nick Cowern
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.33-38,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
3.

Conference Proceedings
Conference Proceedings
3. Doping of Sub-50nm SOI Layers
Bartek J. Pawlak ; Ray Duffy ; Mark van Dal ; Frans Voogt ; Robbert Weemaes ; Fred Roozeboom ; Peer Zalm ; Nick Bennett ; Nick Cowern
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.169-176,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070