1.

Conference Proceedings
Conference Proceedings
1. A new analysis strategy for CD metrology using rapid photo goniometry method
Petit, J. ; Barritault, P. ; Hazart, J. ; Chaton, P. ; Boher, P. ; Luet, M. ; Leroux, T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.210-221,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Innovative rapid photogoniometry method for CD metrology
Boher, P. ; Luet, M. ; Leroux, T. ; Petit, J. ; Barritault, P. ; Hazart, J. ; Chaton, P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1302-1313,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375