1.

Conference Proceedings
Conference Proceedings
1. HYDROGEN IN DIELECTRIC FILM FORMATION FROM AN ELECTRON CYCLOTRON RESONANCE PLASMA
Barbour, J. C. ; Stein, H. J.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.313-318,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
2.

Conference Proceedings
Conference Proceedings
2. THE ECR-PLASMA DEPOSITION OF SILICON NITRIDE ON A TUNNEL OXIDE
Barbour, J. C. ; Stein, H. J. ; Outten, C. A.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.91-96,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
3.

Conference Proceedings
Conference Proceedings
3. HYDROGEN IN DIELECTRIC FILM FORMATION FROM AN ELECTRON CYCLOTRON RESONANCE PLASMA
Barbour, J. C. ; Stein, H. J.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.775-780,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235