1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF WAFER BACKSIDE CLEAN PROCESS ON THE ULSI LITHOGRAPHY
Balasubramanian, N. ; Roy, M-M. ; Pauline, H.G. ; Dow, F. P.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.803-810,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. EFFECT OF WAFER BACKSIDE CLEAN PROCESS ON THE ULSI LITHOGRAPHY
Balasubramanian, N. ; Roy, M-M. ; Dow, F.P. ; Pauline, H.G.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.803-812,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2