B.T. Beauchemin, Jr. ; R.J. Hurditch ; M.A. Toukhy ; A.J. Blakeney
Pub. info.:
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.282-293, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.726-736, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering