1.

Conference Proceedings
Conference Proceedings
1. Electronic Properties of Defects Formed in n-Si During Sputter-Etching in an Ar Plasma
Deenapanray, P. N. K. ; Auret, F. D. ; Schutte, C. ; Myburg, G. ; Meyer, W. E. ; Malherbe, J. B. ; Ridgway, M. C.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.87-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
2.

Conference Proceedings
Conference Proceedings
2. Electrical Characterization of Defects Introduced During Plasma-Based Processing of GaAs
Auret, F. D. ; Myburg, G. ; Meyer, W. E. ; Deenapanray, P. N. K. ; Nordhoff, H. ; Murtagh, M. ; Ye, Shu-Ren ; Masterson, H. J. ; Beechinor, J. T. ; Crean, G. M.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.51-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
3.

Conference Proceedings
Conference Proceedings
3. Characterization of a Metastable Defect Introduced in Epitaxially Grown Boron-Doped Si by 5.4 MeV α-Particles
Mamor, M. ; Auret, F. D. ; Goodman, S. A. ; Meyer, W. E.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.449-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510