1.

Conference Proceedings
Conference Proceedings
1. INTERACTION OF ATOMIC HYDROGEN WITH ION BOMBARDMENTS INDUCED DEFECTS AT Si/SiO2 INTERFACES
Kar, S. ; Ashok, S.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.281-286,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. PASSIVATION OF ION-BEAM-INDUCED DEFECTS AT AND AROUND THE Si-SiP2 INTERFACE BY ION BEAM HYDROGENATION
Kar, S. ; Srikanth, K. ; Ashok, S.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.1049-1054,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
3.

Conference Proceedings
Conference Proceedings
3. Study of Low Energy Hydrogen Implantation for the Removal of Process-Induced Damage in MOS Structures
Kar, S. ; Ashok, S.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.385-395,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21