1.

Conference Proceedings
Conference Proceedings
1. Plasma Chemistry Dependent ECR Etching of GaN
Shul, R. J. ; Ashby, C. I. H. ; Rieger, D. J. ; Howard, A. J. ; Pearton, S. J. ; Abernathy, C. R. ; Vartuli, C. B. ; Barnes, P. A. ; Davis, P.
Pub. info.: Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.751-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 395
2.

Conference Proceedings
Conference Proceedings
2. ECR PLASMA SYNTHESIS OF SILICON NITRIDE FILMS ON GaAs AND InSb
Barbour, J. C. ; Lovejoy, M. L. ; Ashby, C. I. H. ; Howard, A. J. ; Custer, J. S. ; Shul, R. J.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.899-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316