1.

Conference Proceedings
Conference Proceedings
1. TEMPERATURE UNIFORMITY OPTIMIZATION USING THREE-ZONE LAMP AND DYNAMIC CONTROL IN RAPID THERMAL MULTIPROCESSOR
Apte, Pushkar P. ; Wood, Samuel ; Booth, Len ; Saraswat, Krishna C. ; Moslehi, Mehrdad M.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.209-214,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
2.

Conference Proceedings
Conference Proceedings
2. DEMONSTRATION OF MULTIPROCESSING BY SILICON EPITAXY FOLLOWING IN-SITU CLEANING
Apte, Pushkar P. ; Venkatraman, Ramnath ; Saraswat, Krishna C. ; Moslehi, Mehrdad M. ; Yeakley, Richard
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.273-278,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
3.

Conference Proceedings
Conference Proceedings
3. THERMALLY DRIVEN IN-SITU REMOVAL OF NATIVE OXIDE USING ANHYDROUS HYDROGEN FLUORIDE
Apte, Pushkar P. ; Park, Heungsoo ; Saraswat, Krishna C. ; Helms, C. R.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.281-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318