1.

Conference Proceedings
Conference Proceedings
1. Theoretical and Experimental Analysis of the Low Dielectric Constant of Fluorinated Silica
Angyal, M. ; baugh, Ash. ; D, M. ; Demkov, A. ; Filipiak, S. ; Gregory, R. B. ; Kottke, M. ; Liu, R. ; Mclntyre, L. C. ; Werho, D. ; Zollner, S.
Pub. info.: The optical properties of materials : symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.255-260,  2000.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 579
2.

Conference Proceedings
Conference Proceedings
2. Theoretical And Experimental Analysis Of The Low Dielectric Constant Of Fluorinated Silica
Demkov, A.A. ; Zollner, S. ; Liu, R. ; Werho, D. ; Kottke, M. ; Gregory, R.B. ; Angyal, M. ; Filipiak, S. ; Adams, G.B.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D3.8-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612