1.

Conference Proceedings
Conference Proceedings
1. Integration of Multi-Level Copper Metallization into a High-Performance Sub-0.25 ｦﾌm Technology
Venkatraman, R. ; Jain, A. ; Farkas, J. ; Mendonca, J. ; Hamilton, G. ; Capasso, C. ; Denning, D. ; Simpson, C. ; Rogers, B. ; Frisa, L. ; Ong, T. P. ; Herrick, M. ; Kaushik, V. ; Gregory, R. ; Apen, E. ; Angyal, M. ; Filipiak, S. ; Crabtree, P. ; Sparks, T. ; Anderson, S.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.41-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. Theoretical and Experimental Analysis of the Low Dielectric Constant of Fluorinated Silica
Angyal, M. ; baugh, Ash. ; D, M. ; Demkov, A. ; Filipiak, S. ; Gregory, R. B. ; Kottke, M. ; Liu, R. ; Mclntyre, L. C. ; Werho, D. ; Zollner, S.
Pub. info.: The optical properties of materials : symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.255-260,  2000.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 579
3.

Conference Proceedings
Conference Proceedings
3. Theoretical And Experimental Analysis Of The Low Dielectric Constant Of Fluorinated Silica
Demkov, A.A. ; Zollner, S. ; Liu, R. ; Werho, D. ; Kottke, M. ; Gregory, R.B. ; Angyal, M. ; Filipiak, S. ; Adams, G.B.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D3.8-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612