1.

Technical Paper

Technical Paper
Andre, F. ; Hervier, J.
Pub. info.: AIAA paper.  2002.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA International Communications Satellite Systems Conference
Ser. no.: 2002
2.

Conference Proceedings

Conference Proceedings
Bicais-Lepinay, N. ; Andre, F. ; Brevers, S. ; Guyader, P. ; Trouiller, C. ; Kwakman, L. F. Tz. ; Pokrant, S. ; Verkleij, D. ; Schampers, R. ; Ithier, L. ; Sicurani, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615217-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152